Product Overview for 1700C CVD Tube Furnace
1700C series Gas controlled CVD tube furnace features intergrate two or three gas channels, mixed gas controlled system, high alumina ceramic tube with SS304 sealing flanges, heated by MoSi2 rods, Tmax 1700 degree C (1500C under high vacuum level). Microprocessor-based self-tuning PID provides excellent control with no overshooting and +/- 1 °C accuracy. Max vacuum level could be reached to 10E-3 torr with molecular vacuum pump.
Main Features
- Tmax 1700 °C
- Electric heated, two heating zones, high temperature, vacuum tube furnace
- Dual steel structure, non-Split furnace chamber to protect minium heat loss
- Multiple atmosphere processes in a single cycle are available
- Max Vacuum level achieve 10E-3 torr worked with molecular pump
- Fiber-insulated chamber with powerful MoSi2 heating elemets ensure uniform temperature ensure uniform temperature
- Shimaden PID temperature controller with programmable 30 segments
- SS304 vacuum sealing flanges with valves and pressure meter included
- Dual flanges support provides better sealing and longer tube life
- Long life type B thermocouple
- CE certified, standard
Ramping, Dwelling, Cooling Curves for 1700 Series Tube Furnaces
Safety Measures
- Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
- Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
- Power failure protection resumes furnace operation right after the point of failure when power is reestablished
- Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot
Technical Specifications
| Model No. | PTC D80/600/17/2 |
| Heating zone | - TWO heating length 600mm
- Uniform temp zone: 280mm
|
| Power supply | 5KW AC208-240V, 50/60Hz, single phase |
| Working temperature | - Tmax 1700°C (3092°F)
- Continuously 1600°C (2912°F)
- Temperature uniformity +/- 5C
|
| Temperature controller | - 30 programmable segments for heating, cooling and dwelling.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
|
| Heating rate | ≤10°C /min |
| Thermocouple | B type |
| Chamber lining | Mitsubishi raw material high alumina 1800 grade fiber board |
| Furnace tube | - High purity mullite tube OD80mm, ID 72mm, tube length 900mm
- Equips vacuum flanges with gas inlet and outlet valve
|
| Vacuum flanges | - Pair of hinged type SS304 flanges with needle valves
- Water cold hinged type flange is available upon request at extra cost
|
| Vaccum level | - 10^-1 torr by the mechanical pump
- 10^-3 Torr by a molecular pump
|
| Atmosphere gas | Argon, Nitrogen etc |
| Heating element | - Super 1800 grade MoSi2 heating element
- Note: Heating elements are consumable, and not covered by warranty, we recommend to order extra set of heaters as spareparts
|
| Shipping info | Weight: 260kgs W1100xL650xH1200mm |
| Compliance | CE, ISO |
| Warranty | 2 years limited warranty with lifetime technical support |
Application Notes
- Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
- 1700C tube furnaces with alumina tube are designed for use under vacuum and low pressure; 0.2 bars / 3 psi / 0.02 MPa
- To minimize the cracking rate of the ceramic tubes, please change the position (mark four points on the tube) each batch
- Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating
Size Comparison
| Item name | PT D40/300/17 | PT D60/300/17 | PT D100/300/17 |
| Heating length | 300 mm | 300 mm | 300 mm |
| Tube size | OD40xL900mm | OD60xL900mm | OD100xL900mm |
| Power | 220V/3KW | 220V/4KW | 220V/5KW |
| Furnace dimensions (LxWxH) | 1030x500x800mm | 1050x520x830mm | 1100x580x850mm |
| Net Weight | 150 KGS | 170 KGS | 290 KGS |
